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A highly sensitive evaluation method for the determination of different current conduction mechanisms through dielectric layers
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2011
Journal Article
Title
A highly sensitive evaluation method for the determination of different current conduction mechanisms through dielectric layers
Author(s)
Murakami, M.
Rommel, M.
Yanev, V.
Erlbacher, T.
Bauer, A.J.
Frey, L.
Journal
Journal of applied physics
Open Access
DOI
10.1063/1.3631088
Additional full text version
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Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
Keyword(s)
IV characteristics
alpha-V
current conduction mechanisms
