• English
  • Deutsch
  • Log In
    Password Login
    Research Outputs
    Fundings & Projects
    Researchers
    Institutes
    Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Artikel
  4. Guided phase separation of polymer blend thin films on ion beam-induced pre-patterned substrates
 
  • Details
  • Full
Options
2010
Journal Article
Title

Guided phase separation of polymer blend thin films on ion beam-induced pre-patterned substrates

Abstract
A technique for fabricating pre-pattern induced phase-separated polymer blend films is presented. The gold layer coated silicon substrates were bombarded with focused ion beams (FIB) to sputter away Au grains in the irradiated regions and expose silicon oxide surface underneath, thereby creating pre-patterns of relatively hydrophobic (Au)/hydrophilic (silicon oxide) regions. In the pre-patterned regions, the spin-coated films consisting of immiscible PS (polystyrene) and PtBA (poly-tert-butyl acrylate) blend exhibited phase separation induced by the underlying pre-patterns and formed two distinct ordered morphologies with periodicities much smaller than that of the pre-patterns. The influence of varying periodicities of the pre-patterned structures, blending ratios and spin-coating paramet ers on the resulting morphologies are presented.
Author(s)
Karade, Y.
Madani-Grasset, F.
Berger, R.
Csiba, V.
Rommel, M.  orcid-logo
Dietzel, A.
Journal
Microelectronic engineering  
Conference
International Conference on Micro and Nano Engineering (MNE 2009) 2009  
DOI
10.1016/j.mee.2009.11.016
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Keyword(s)
  • polymer blend film

  • phase separation

  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Contact
© 2024