Nanostructuring with nanojoule femtosecond laser pulses

Sub-wavelength multiphoton nanoprocessing of silicon wafers, direct nanowriting of metals, boro-silicate glass or polymers, laser processing for nanofluidics applications as well as 3D maskless li-thography by two-photon polymerization have been performed using several compact near infrared MHz femtosecond lasers as tuneable turn-key, one-box Chameleon (coherent) and Mai-Tai (spectra physics) oscillators as well as a special femtoTrain system (High Q laser production GmbH). The lasers were coupled with the scanning microscopes FemtOcut (JenLab GmbH) and a modified ZEISS LSM510-NLO system. MHz femtosecond laser pulses with nanojoule photon energies can be considered as novel tools for nanoprocessing in material science, nanobiotechnology and nanomedicine.