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2008
Journal Article
Titel
High-cycle fatigue and strengthening in polycrystalline silicon
Abstract
The reliability of MEMS-based sensors for automotive applications critically depends on their high-cycle load-bearing capacity. To investigate the influence of high-frequency cyclic loading on mechanical properties of polycrystalline silicon, a statistically based investigation with the use of novel rotational specimens (90 kHz) has been conduced. Either fatigue fracture (above 3 GPa) or strengthening of the material at cyclic loading below 3 GPa has been observed.