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Effects of X-ray radiation on the surface chemical composition of plasma deposited thin fluorocarbon films
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2008
Journal Article
Title
Effects of X-ray radiation on the surface chemical composition of plasma deposited thin fluorocarbon films
Author(s)
Himmerlich, M.
Yanev, V.
Opitz, A.
Keppler, A.
Schäfer, J.A.
Krischok, S.
Journal
Polymer degradation and stability
DOI
10.1016/j.polymdegradstab.2007.12.004
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
