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  4. Memetic algorithms: Parametric optimization for microlithography
 
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2007
Book Article
Title

Memetic algorithms: Parametric optimization for microlithography

Author(s)
Dürr, C.
Fühner, T.
Tollkühn, B.
Erdmann, A.  
Kokai, G.
Mainwork
Hybrid evolutionary algorithms  
DOI
10.1007/978-3-540-73297-6_9
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
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