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Memetic algorithms: Parametric optimization for microlithography
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2007
Book Article
Title
Memetic algorithms: Parametric optimization for microlithography
Author(s)
Dürr, C.
Fühner, T.
Tollkühn, B.
Erdmann, A.
Kokai, G.
Mainwork
Hybrid evolutionary algorithms
DOI
10.1007/978-3-540-73297-6_9
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
