English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Have you forgotten your password?
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
Direct optimization approach for lithographic process conditions
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
2007
Journal Article
Title
Direct optimization approach for lithographic process conditions
Author(s)
Fühner, T.
Erdmann, A.
Seifert, S.
Journal
Journal of Microlithography, Microfabrication, and Microsystems
DOI
10.1117/1.2785031
Language
English
Fraunhofer-Institut für Integrierte Schaltungen IIS
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
