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Direct optimization approach for lithographic process conditions
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2007
Journal Article
Title
Direct optimization approach for lithographic process conditions
Author(s)
Fühner, T.
Erdmann, A.
Seifert, S.
Journal
Journal of Microlithography, Microfabrication, and Microsystems
DOI
10.1117/1.2785031
Language
English
Fraunhofer-Institut für Integrierte Schaltungen IIS
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
