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Low-temperature plasma processing of materials: Past, present, and future
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2005
Journal Article
Title
Low-temperature plasma processing of materials: Past, present, and future
Author(s)
D'Agostino, R.
Favia, P.
Oehr, Christian
Wertheimer, M.R.
Journal
Plasma Processes and Polymers
DOI
10.1002/ppap.200400074
Language
English
Fraunhofer-Institut für Grenzflächen- und Bioverfahrenstechnik IGB
