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Comparison of dilute nitride growth on a single- and 8×4-inch multiwafer MOVPE system for solar cell applications
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2004
Zeitschriftenaufsatz
Titel
Comparison of dilute nitride growth on a single- and 8×4-inch multiwafer MOVPE system for solar cell applications
Author(s)
Dimroth, F.
Baur, C.
Bett, A.W.
Volz, K.
Stolz, W.
Zeitschrift
Journal of Crystal Growth
DOI
10.1016/j.jcrysgro.2004.08.038
Language
Englisch
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Epitaxie
Epitaxie MOVPE