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  4. Comparison of dilute nitride growth on a single- and 8×4-inch multiwafer MOVPE system for solar cell applications
 
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2004
  • Zeitschriftenaufsatz

Titel

Comparison of dilute nitride growth on a single- and 8×4-inch multiwafer MOVPE system for solar cell applications

Author(s)
Dimroth, F.
Baur, C.
Bett, A.W.
Volz, K.
Stolz, W.
Zeitschrift
Journal of Crystal Growth
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DOI
10.1016/j.jcrysgro.2004.08.038
Language
Englisch
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Tags
  • Epitaxie

  • Epitaxie MOVPE

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