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Boron carbonitride thin films by PACVD of single source percursors
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1997
Journal Article
Title
Boron carbonitride thin films by PACVD of single source percursors
Author(s)
Hegemann, Dirk
Riedel, R.
Dreßler, W.
Oehr, Christian
Schindler, B.
Brunner, H.
Journal
Chemical vapor deposition: CVD
DOI
10.1002/cvde.19970030503
Language
English
Fraunhofer-Institut für Grenzflächen- und Bioverfahrenstechnik IGB
