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Trajectory split method for Monte-Carlo simulation of ion implantation
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1995
Journal Article
Title
Trajectory split method for Monte-Carlo simulation of ion implantation
Author(s)
Bohmayr, W.
Burenkov, A.
Fraunhofer-Institut für Integrierte Schaltungen IIS
Lorenz, J.
Ryssel, H.
Selberherr, S.
Journal
IEEE transactions on semiconductor manufacturing
DOI
10.1109/66.475181
Language
English
IIS-B
