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1995
Journal Article
Title

Plasmafeinreinigen. Perspektiven

Other Title
Plasma fine cleaning. Possibilities and limits
Abstract
The present article provides a survey of the use of low-pressure plasma plants for cleaning and the pretreatment of solvent and aqueous-alkaline processes, where even anorganic pollutions may be partly eliminated as well. Frequently, however, a wet chemical cleaning is still indispensable.
Author(s)
Oehr, Christian  
Vohrer, Uwe  orcid-logo
Journal
Metalloberfläche : mo  
Language
German
Fraunhofer-Institut für Grenzflächen- und Bioverfahrenstechnik IGB  
Keyword(s)
  • low pressure plasma cleaning

  • Niederdruck-Plasmabehandlung

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