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Anatomistic evaluation of diffusion theories for the dopants in vacancy gradients
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1995
Journal Article
Title
Anatomistic evaluation of diffusion theories for the dopants in vacancy gradients
Author(s)
List, S.
Pichler, P.
Ryssel, H.
Journal
Microelectronics journal
DOI
10.1016/0026-2692(95)98928-K
Language
English
IIS-B
