English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
Anatomistic evaluation of diffusion theories for the dopants in vacancy gradients
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
1995
Journal Article
Title
Anatomistic evaluation of diffusion theories for the dopants in vacancy gradients
Author(s)
List, S.
Pichler, P.
Ryssel, H.
Journal
Microelectronics journal
DOI
10.1016/0026-2692(95)98928-K
Language
English
IIS-B
