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  4. Low loss singlemode optical waveguides with large cross-section in silicon-on-insulator
 
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1991
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Titel

Low loss singlemode optical waveguides with large cross-section in silicon-on-insulator

Abstract
The realisation of singlemode rib waveguides in silicon-on-insulator (SOI) having a width and height of several micrometres is reported. Measurements at a wavelength of 1x3 and 1x55fm yield waveguide losses below 0x5dB/cm and an excellent agreement of the near field intensity distribution with the one predicted by a BPM simulation.
Author(s)
Schmidtchen, J.
Splett, A.
Schüppert, B.
Petermann, K.
Burbach, G.
Zeitschrift
Electronics Letters
Thumbnail Image
DOI
10.1049/el:19910930
Language
Englisch
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IMS
Tags
  • optical waveguides

  • optoelectronics

  • SIMOX

  • SOI

  • waveguide

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