Title

Plasma Processing 19

Title Supplement

Symposium ""Plasma Processing 19"", held during the PRiME 2012 joint international meeting, held in Honolulu, Hawaii, from October 7 to 12, 2012

Person Involved

Corporate Author

Electrochemical Society -ECS-

Japan Society of Applied Physics -JSAP-

Publisher

Publishing Place

Pennington, NJ

Publication Date

2013

Series

ECS transactions; Vol.50, Nr.46

ISBN

978-1-62332-082-9

978-1-60768-434-3

Conference