Title

Two- and three-dimensional methods for inspection and metrology V

Title Supplement

11 - 12 September 2007, Boston, Massachusetts, USA

Person Involved

Corporate Author

Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.

Publisher

Publishing Place

Bellingham, WA

Publication Date

2007

Series

Proceedings of SPIE; 6762

ISBN

978-0-8194-6922-9

Conference