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Electrostatic driven scanning micro mirrors applied in spectral sensing devices
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2004
Journal Article
Title
Electrostatic driven scanning micro mirrors applied in spectral sensing devices
Author(s)
Saupe, Ray
Otto, Thomas
Mehner, J.
Kurth, Steffen
Kaufmann, C.
Geßner, Thomas
Journal
MST News
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
