Performance of magnetically driven MEMS piezoelectric energy harvester and its application as a transducer for a near zero-power wake-up

In this article we present recent results on magnetically driven piezoelectric MEMS energy harvesters. The performance of different harvester designs was determined in resonance and under low-frequency magnetic pulse-like excitation. The latter measurements represent an application-oriented scenario, which allows to harvest energy from e.g., translational and rotational motions. We demonstrate that in resonance power outputs of > 100 µW are achievable. Frequency up-conversion can be facilitated to obtain power outputs of > 10 µW at low frequencies. The power output under frequency up-conversion is sufficient to switch a power MOSFET and initiate a near-zero-power wake-up.