Photonic crystal microcavities in SOI photonic wires for WDM filter applications

We report on the design, fabrication, and optical characterization of silicon-on-insulator.-based one-dimensional (I-D) photonic crystal (PhC) microcavides. The scope of this paper lies on filters for communication systems around 1.55-mu m wavelength. Detailed calculations of filter performance against the relevant device layout parameters are given. Resonant cavity modes with quality factors as high as Q approximate to 630 in the 1.55 mu m wavelength band were measured for filters comprised of two PhC mirrors containing 2 x 5 holes, that were 200 nm in diameter. This is the highest Q-value reported of such a filter up to now.