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Connected fit algorithm for optical investigations of large area coatings
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2005
Journal Article
Title
Connected fit algorithm for optical investigations of large area coatings
Author(s)
Gnehr, W.-M.
Hartung, U.
Kopte, T.
Journal
Thin solid films
DOI
10.1016/j.tsf.2004.10.026
Language
English
Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP
Keyword(s)
sputtering
optical spectroscopy
indium tin oxide
