Coherent Off-Axis Terahertz Tomography with a Multi-Channel Array and f-theta Optics

Terahertz tomography is a promising method among non-destructive inspection techniques to detect faults and defects in dielectric samples. Recently, image quality was improved significantly through the incorporation of a priori information and off-axis data. However, this improvement has come at the cost of increased measurement time. To aim toward industrial applications, it is therefore necessary to speed up the measurement by parallelizing the data acquisition employing multi-channel setups. In this work, we present two tomographic frequency-modulated continuous wave (FMCW) systems working at a bandwidth of 230–320 GHz, equipped with an eight-channel detector array, and we compare their imaging results with those of a single-pixel setup. While in the first system the additional channels are used exclusively to detect radiation refracted by the sample, the second system features an f-θ lens, focusing the beam at different positions on its flat focal plane, and thus utilizing the whole detector array directly. The usage of the f-θ lens in combination with a scanning mirror eliminates the necessity of the formerly used slow translation of a single-pixel transmitter. This opens up the potential for a significant increase in acquisition speed, in our case by a factor of four to five, respectively.