English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Have you forgotten your password?
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
Micro mirror arrays for VLSI mask fabrication
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
2003
Book Article
Title
Micro mirror arrays for VLSI mask fabrication
Author(s)
Schenk, H.
Dauderstädt, U.
Dürr, P.
Lakner, H.K.
Mainwork
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme. Annual Report 2002
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS