Micro-mechanical external-cavity laser with wide tuning range

We report on GaSb-based quantum-well diode lasers in a micro-machined external cavity setup using the Littrow-configuration. An electrostatically-actuated silicon-grating, optimized to achieve a wide tuning range in the 2.3 µm wavelength range, is used as tuning element. A tuning range of 82 nm could be realized. The maximum output power of the micro external cavity laser (µECL) was above 15 mW over the entire tuning range.