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Recent trends in developments of MEMS and nanoelectronic sensors
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2015
Conference Paper
Title
Recent trends in developments of MEMS and nanoelectronic sensors
Author(s)
Scholles, Michael
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Mainwork
International NANO Industrial City Forum and Exhibition 2015
Conference
International NANO Industrial City Forum and Exhibition 2015
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS