English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Electrodeposition of 3D microstructures without molds
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
1996
Conference Paper
Title
Electrodeposition of 3D microstructures without molds
Author(s)
Macioßek, A.
Mainwork
Micromachining and microfabrication process technology II
Conference
Conference on Micromachining and Microfabrication Process Technology 1996
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
