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Microflex: A New Technique for Hybrid Integration for Microsystems
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1998
Conference Paper
Title
Microflex: A New Technique for Hybrid Integration for Microsystems
Author(s)
Beutel, H.-J.
Stieglitz, T.
Meyer, J.-U.
Mainwork
Micro Electro Mechanical Systems 1998
Conference
International Workshop on Micro Electro Mechanical Systems (MEMS) 1998
Language
English
Fraunhofer-Institut für Biomedizinische Technik IBMT
