InAs/GaSb superlattice focal plane arrays for high performance thermal imaging

We report on our developments of InAs/GaSb superlattice photodiodes for the realization of high performance thermal imaging systems in the mid-wavelength infrared spectral range between 3 and 5 µm. The first, fully operational 256x256 mid-IR camera with a thermal resolution below 10 mk and a very uniform performance has been realized. We show that by increasing the active layer's thickness a quantum efficiency of at least 60% seems feasible. We also present the first bi-spectral 288x384 InAs/GaSb superlattice mid-IR camera featuring a simultaneous detection of both channels on each pixel. The system offers a thermal resolution better than 30 mk for shortwave radiation between 3 to 4 µm and better than 17 mK for the 4-5 µm spectral channel.