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  4. Process-independent Integrated Sensitivity Calibration of 3D Hall Sensors
 
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2010
Conference Paper
Title

Process-independent Integrated Sensitivity Calibration of 3D Hall Sensors

Title Supplement
Abstract
Abstract
An excitation coil arrangement for 3D Hall sensors, which allows the integrated calibration of all three orthogonal sensitivities independent of process tolerances, is shown.
Author(s)
Stahl-Offergeld, M.
Ernst, R.
Hohe, H.-P.
Schütze, A.
Mainwork
8th European Magnetic Sensors and Actuators Conference, EMSA 2010. Book of Abstracts  
Conference
European Magnetic Sensors and Actuators Conference 2010  
Language
English
Fraunhofer-Institut für Integrierte Schaltungen IIS  
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