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MEMS Metallization
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2004
Conference Paper
Title
MEMS Metallization
Author(s)
Lohmann, C.
Gottfried, K.
Bertz, A.
Reuter, D.
Hiller, K.
Kuhn, M.
Gessner, T.
Mainwork
Materials, technology and reliability for advanced interconnects and low-k dielectrics 2004
Conference
Symposium F: "Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics" 2004
Materials Research Society (Spring Meeting) 2004
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
