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3D Integration for MEMS devices using photosenitive glass
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2011
Conference Paper
Title
3D Integration for MEMS devices using photosenitive glass
Author(s)
Wünsch, Dirk
Hofmann, Christian
Besser, J.
Schubert, I.
Gottfried, Knut
Wiemer, Maik
Geßner, Thomas
Mainwork
Smart systems integration 2011. 5th European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components. CD-ROM
Conference
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 2007
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
