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Fabrication of micro needle arrays using an ultra short pulse laser
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2015
Conference Paper
Title
Fabrication of micro needle arrays using an ultra short pulse laser
Author(s)
Enderlein, Tom
Nestler, J.
Otto, Thomas
Geßner, Thomas
Mainwork
Smart Systems Integration 2015
Conference
Smart Systems Integration Conference (SSI) 2015
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components 2015
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
