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Fine tuned profile simulation of holographically exposed photoresist gratings
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1998
Journal Article
Title
Fine tuned profile simulation of holographically exposed photoresist gratings
Author(s)
Zanke, C.
Gombert, A.
Erdmann, A.
Weiss, M.
Journal
Optics communications
DOI
10.1016/S0030-4018(98)00252-1
Language
English
Fraunhofer-Institut für Solare Energiesysteme ISE
Fraunhofer-Institut für Siliziumtechnologie ISIT
