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In-situ spectroscopic ellipsometry in vertical furnace - monitoring and control of high-temperature processes
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2001
Journal Article
Title
In-situ spectroscopic ellipsometry in vertical furnace - monitoring and control of high-temperature processes
Author(s)
Petrik, P.
Schneider, C.
Journal
Vacuum
DOI
10.1016/S0042-207X(01)00139-7
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
