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  4. Realization of a computed tomography setup to achieve resolutions below 1 mu m
 
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2008
Journal Article
Title

Realization of a computed tomography setup to achieve resolutions below 1 mu m

Author(s)
Salamon, M.
Hanke, R.
Krüger, P.
Uhlmann, N.
Voland, V.
Journal
Nuclear instruments and methods in physics research, Section A. Accelerators, spectrometers, detectors and associated equipment  
DOI
10.1016/j.nima.2008.03.024
Language
English
Fraunhofer-Institut für Integrierte Schaltungen IIS  
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