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Advances in plasma emission monitoring for reactive DC magnetron sputtering
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1995
Conference Paper
Title
Advances in plasma emission monitoring for reactive DC magnetron sputtering
Author(s)
Kirchhoff, V.
Mainwork
Society of Vacuum Coaters. 38th Annual Technical Conference 1995. Proceedings
Conference
Society of Vacuum Coaters (Annual Technical Conference) 1995
Language
English
Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP
