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Plasmaactivated reactive evaporation of AL203 on plastic films - state of the art and outlook
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1994
Conference Paper
Title
Plasmaactivated reactive evaporation of AL203 on plastic films - state of the art and outlook
Author(s)
Schiller, S.
Mainwork
European Vacuum Coaters. Symposium '94. Proceedings
Conference
European Vacuum Coaters (Symposium) 1994
Language
English
Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP
