1983
Journal Article
Title

Properties of crosslinked positiv-acting X-ray, resists, fabricated on the basis of poly

Other Title
methylmethacrylate - co-methacryl chloride
Author(s)
Asmussen, F.
Betz, H.
Chen, B.T.
Heuberger, A.
Pongratz, S.
Sotobayashi, H.
Schnabel, W.
Journal
Language
English
Keyword(s)