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Tailoring the structure of low-temperature-deposited microcrystalline silicon films by biasing the substrate
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2001
Conference Paper
Title
Tailoring the structure of low-temperature-deposited microcrystalline silicon films by biasing the substrate
Author(s)
Birkholz, M.
Selle, B.
Fuhs, W.
Williamson, D.L.
Mainwork
Amorphous and heterogeneous silicon-based films 2001
Conference
Materials Research Society (Spring Meeting) 2001
Language
English
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST
