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  4. Fabrication of 3.5 GHz surface acoustic wave filters by ion projection lithography
 
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1992
Journal Article
Title

Fabrication of 3.5 GHz surface acoustic wave filters by ion projection lithography

Author(s)
Kreutzer, M.
Zwicker, G.
Fleischmann, B.
Brünger, W.H.
Buchmann, L.-M.
Torkler, M.
Journal
Microelectronic engineering  
Conference
International Conference on Microlithography: Microcircuit Engineering (ME) 1991  
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT  
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