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  4. Enhancement of Ohmic heating by Hall current in magnetized capacitively coupled discharges
 
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2019
Journal Article
Title

Enhancement of Ohmic heating by Hall current in magnetized capacitively coupled discharges

Abstract
In low-pressure capacitively coupled discharges, a heating mode transition from a pressure-heating dominated state to an Ohmic-heating dominated state is known by applying a small transverse magnetic field. Here we demonstrate via particle-in-cell simulations and a moment analysis of the Boltzmann equation that the enhancement of Ohmic heating is induced by the Hall current in the ${\boldsymbol{E}}\times {\boldsymbol{B}}$ direction. As the magnetic field increases, the Ohmic heating in the ${\boldsymbol{E}}\times {\boldsymbol{B}}$ direction dominates the total electron power absorption. The Ohmic heating induced by the Hall current can be well approximated from the Ohmic heating of unmagnetized capacitively coupled discharges.
Author(s)
Zheng, B.C.
Wang, K.
Grotjohn, T.
Schuelke, T.
Fan, Q.H.
Journal
Plasma sources science & technology  
DOI
10.1088/1361-6595/ab419d
Language
English
CCD  
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