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Prediction of wafer homogeneity maps using a virtual metrology scheme consisting of time resolved OES measurements and a neural network
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2011
Conference Paper
Title
Prediction of wafer homogeneity maps using a virtual metrology scheme consisting of time resolved OES measurements and a neural network
Author(s)
Zimmermann, Sven
Reich, Renè
Zacher, Manuela
Schulz, Stefan E.
Geßner, Thomas
Mainwork
11th European Advanced Equipment Control/Advanced Process Control Conference, AEC/APC 2011
Conference
European Advanced Equipment Control/Advanced Process Control Conference (AEC/APC) 2011
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
