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Analysis and control of ion beam processing by optical spectroscopy
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1993
Journal Article
Title
Analysis and control of ion beam processing by optical spectroscopy
Author(s)
Heinrich, F.
Hoffmann, P.
Journal
Vacuum
DOI
10.1016/0042-207X(93)90169-B
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
