Infiltration of individual pores in macroporous silicon photonic crystals

A new and promising approach for the design and fabrication of novel otpical devices is the functionalization of individual pores in 2D photonic crystals (PhC). This can be done by infiltrating the pores with polymers or dyes. We present a method to locally infiltrate individual pores. This new technique enables the fabrication of a new class of devices, such as otpical switches or multiplexers. For the infiltration of individual pores 2D PhC templates made of macroporous silicon were used. Local addressing of the pores is carried out by using focused ion beam technology. For the infiltration itself the wetting assisted templating process is applied. We will present expersimentally the infiltration of different polymers and different optical designs.