• English
  • Deutsch
  • Log In
    Password Login
    Research Outputs
    Fundings & Projects
    Researchers
    Institutes
    Statistics
Repository logo
Fraunhofer-Gesellschaft
  1. Home
  2. Fraunhofer-Gesellschaft
  3. Artikel
  4. Extraction of elastic-plastic material properties of thin films through nanoindentaion technique with support of numerical methods
 
  • Details
  • Full
Options
2011
Journal Article
Title

Extraction of elastic-plastic material properties of thin films through nanoindentaion technique with support of numerical methods

Abstract
Current developments and trends in microelectronics are focused on thin layers and novel materials. This leads to application of different test and measurement methods, which are capable to measure basic mechanical properties of such materials in micro-scale and nano-scale. The presented paper focuses on an application of the nanoindentation technique to extract the basic elastic and elasto-plastic mechanical properties through numerical approaches. In order to extract the elasto-plastic material data of the investigated thin layers the numerical process was designed. Firstly, the nanoindentation process was prepared as finite-element model (FEM). Then, the results were compared to the measurements and processed by the numerical optimization algorithms.
Author(s)
Dowha, L.
Wymysowski, A.
Janus, P.
Ekwiska, M.
Wittler, O.
Journal
Microelectronics reliability  
DOI
10.1016/j.microrel.2011.03.009
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
  • Cookie settings
  • Imprint
  • Privacy policy
  • Api
  • Contact
© 2024