Ultra-precise surface structuring in nanometer scale

Manufacturing of large scale function-alized and structured surfaces require special production processes and machines. Important criteria for those surfaces are the realized surface roughness and contour accuracy. Typical structures for optical applications with a high quality demand are V-grooves, pyramidal and fresnel geometries. The initial mastering process is decisive for the quality in the consecutive replication processes like thermal- or UV-Nanoimprint. Ultra-precision diamond turning can be seen as one efficient methodology for the creation of large area structured drums with a high surface quality.