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Micromotion analysis by deep-UV speckle interferometry
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2003
Conference Paper
Title
Micromotion analysis by deep-UV speckle interferometry
Author(s)
Aswendt, P.
Mainwork
Microsystems engineering: Metrology and inspection III
Conference
Conference "Microsystems Engineering - Metrology and Inspection" 2003
Language
English
Fraunhofer-Institut für Werkzeugmaschinen und Umformtechnik IWU
