1999
Journal Article
Title

Measuring acid generation efficiency in chemically amplified resists with all 3 beams

Author(s)
Szmanda, C.R.
Brainard, R.L.
Mackevich, J.F.
Awaji, A.
Tanaka, T.
Yamada, Y.
Bohland, J.
Tedesco, S.
Dalzotto, B.
Bruenger, W.
Torkler, M.
Fallmann, W.
Loeschner, H.
Kaesmaier, R.
Nealey, P.M.
Pawloski, A.R.
Journal
DOI
Language
English