Evaluation of laser-based active thermography for the inspection of optoelectronical devices

An active microscopic thermographic setup is proposed for high-resolution inspection of optoelectronical devices. A laser is used for thermal excitation of the test object. A setup is proposed, which in principle could be used for inline inspection of the chips. A data processing scheme is proposed for interpretation of the images. Experimental results of the imaging as well as of the processing methods are given for some test samples.