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Silicon microactuators - activation mechanisms and scaling problems
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1991
Conference Paper
Title
Silicon microactuators - activation mechanisms and scaling problems
Author(s)
Benecke, W.
Mainwork
Transducers '91. 6th International Conference on Solid-State Sensors and Actuators. Digest of technical papers
Conference
International Conference on Solid-State Sensors and Actuators 1991
DOI
10.1109/SENSOR.1991.148794
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
