Actuation principles for hybrid two-dimensional quasistatic micro scanning mirrors

In this article a numerical approach for a hybrid actuated two-dimensional micro scanner with large aperture is presented for applications like 3D distance measurement and high power laser applications like laser material treatment or medical laser surgery. No micromachined mirror with large aperture (>ø6 mm) and large quasistatic deflection (>2°) is known. Only fine mechanically fabricated scanners reach large deflection angels with, in comparison to micromirrors, huge aperture [1, 2]. Our approach is, to combine a micromachined structure with an external actuator. To be able to choose the best suitable actuator, an analytical design model was developed. Optimizations of a magnetic actuator guiding the magnetic flux are presented and evaluated experimentally with a gimbal micromirror with 6mm - 8mm mirror plate. Static deflections of 3° were reached.